周期性梯度富硅SiN x薄膜的微结构与发光特性
陈小波1,2, 杨雯1, 段良飞1, 张力元1, 杨培志1

Microstructure and Luminous Property of Periodical Gradient Si-rich SiN x Thin Films
CHEN Xiao-Bo1,2, YANG Wen1, DUAN Liang-Fei1, ZHANG Li-Yuan1, YANG Pei-Zhi1
图 1 制备薄膜时溅射的功率变化
Fig. 1 Variation of the sputtering powers during film Sample 1, Single layer film; Sample 2, gradient- layer film